The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Sep. 13, 2013
Inotera Memories, Inc., Taoyuan County, TW;
Tzung-Han Lee, Taipei, TW;
Inotera Memories, Inc., Taoyuan County, TW;
Abstract
A stacked capacitor structure of the instant disclosure comprises a substrate and a plurality of stacked capacitors. The substrate has an insulating layer formed thereon and a plurality of contact plugs in the insulating layer, wherein the contact plugs are exposed on the upper surface of the insulating layer. Specially, each of the stacked capacitors comprises a lower electrode, a dielectric layer, and an upper electrode. The lower electrode is arranged on one of the contact plugs and has a columnar base portion and a crown shaped upper portion. The dielectric layer is arranged on the lower electrode and covers the outer surface of the lower electrode. The upper electrode is arranged above the lower electrode, wherein the dielectric layer is intermediately between the upper electrode and the lower electrode.