The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Jan. 09, 2014
Applicant:
First Solar, Inc., Perrysburg, OH (US);
Inventors:
Ricky Charles Powell, Ann Arbor, MI (US);
Andrew K. Gray, Perrysburg, OH (US);
Todd A. Coleman, Wayne, OH (US);
Assignee:
First Solar, Inc., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 14/06 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02636 (2013.01); C23C 14/0629 (2013.01); C23C 14/228 (2013.01); H01L 21/0256 (2013.01); H01L 21/0262 (2013.01); H01L 21/02422 (2013.01); H01L 21/02562 (2013.01); Y10T 137/0318 (2015.04);
Abstract
A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.