The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Nov. 15, 2013
Applicant:

Palo Alto Research Center Incorporated, Palo Alto, CA (US);

Inventors:

Pengfei Qi, Palo Alto, CA (US);

William S. Wong, San Carlos, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B01J 7/00 (2006.01); B01J 15/00 (2006.01); B01J 19/24 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 21/02603 (2013.01); B01J 7/00 (2013.01); B01J 15/005 (2013.01); B01J 19/2415 (2013.01); H01L 21/0237 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); B01J 2219/00135 (2013.01); B82Y 40/00 (2013.01); Y10S 118/00 (2013.01);
Abstract

A method for synthesis of silicon nanowires provides a growth reactor having a decomposition zone and a deposition zone. A precursor gas introduced into the decomposition zone is disassociated to form an activated species that reacts with catalyst materials located in the deposition zone to deposit nano-structured materials on a low melting point temperature substrate in the deposition zone. A decomposition temperature in the decomposition zone is greater than a melting point temperature of the low melting point temperature substrate. The silicon nanowire are grown directly on the low melting point temperature substrate in the deposition zone to prevent the higher temperatures in the decomposition zone from damaging the molecular structure and/or integrity of the lower melting point temperature substrate located in the deposition zone.


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