The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Jun. 15, 2010
Applicants:
Friederike Fleischhaker, Ludwigshafen, DE;
Imme Domke, Mannheim, DE;
Andrey Karpov, Mannheim, DE;
Marcel Kastler, Basel, CH;
Veronika Wloka, Mannheim, DE;
Lothar Weber, Bielefeld, DE;
Inventors:
Friederike Fleischhaker, Ludwigshafen, DE;
Imme Domke, Mannheim, DE;
Andrey Karpov, Mannheim, DE;
Marcel Kastler, Basel, CH;
Veronika Wloka, Mannheim, DE;
Lothar Weber, Bielefeld, DE;
Assignee:
BASF SE, Ludwigshafen, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/16 (2006.01); H01L 21/02 (2006.01); H01L 29/10 (2006.01); H01L 29/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02422 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02573 (2013.01); H01L 21/02601 (2013.01); H01L 21/02628 (2013.01);
Abstract
The present invention relates to a process for producing a layer comprising at least one semiconductive metal oxide on a substrate, comprising at least the steps of: