The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Apr. 11, 2011
Applicants:
Scott Howard Williams, Pleasanton, CA (US);
Richard William Campbell, Reinholds, PA (US);
Stephan Glander, Wettswil, CH;
Inventors:
Scott Howard Williams, Pleasanton, CA (US);
Richard William Campbell, Reinholds, PA (US);
Stephan Glander, Wettswil, CH;
Assignee:
QUADRANT EPP AG, Lenzburg, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); H01L 21/02 (2006.01); H01J 37/32 (2006.01); C08G 73/14 (2006.01); C08L 79/08 (2006.01); C08L 71/00 (2006.01); C08L 81/02 (2006.01); C08L 81/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02 (2013.01); C08G 73/14 (2013.01); C08L 71/00 (2013.01); C08L 79/08 (2013.01); C08L 81/02 (2013.01); C08L 81/06 (2013.01); H01J 37/32495 (2013.01); C08G 2650/40 (2013.01);
Abstract
Internal components of plasma reactors are composed of a toleratable, ceramic filled plasma-useful polymer such as a high temperature engineering thermoplastic, preferably a polyamideimide. The parts exhibit a low erosion rate upon exposure to plasma at low pressure.