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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9128004 B1

PDFFull Text
Date of Patent:
Sep. 08, 2015

Filed:

Jul. 17, 2012

Measurement method, measurement apparatus, non-transitory computer-readable storage medium, and optical element fabrication method

Applicant:

Yuki Oshima, Utsunomiya, JP;

Inventor:

Yuki Oshima, Utsunomiya, JP;

Assignee:

CANON KABUSHIKI KAISHA, , JP;

Attorney:

Rossi, Kimms & McDowell LLP

Primary Examiner:

Carol S Tsai

Int. Cl.
CPC ...
G01B 11/24 (2006.01); G01B 11/255 (2006.01); G06F 15/00 (2006.01); G01M 11/02 (2006.01); G01B 9/02 (2006.01); G01M 11/00 (2006.01);
U.S. Cl.
CPC ...
G01M 11/025 (2013.01); G01B 9/02085 (2013.01); G01B 11/2441 (2013.01); G01M 11/005 (2013.01);
Abstract

The present invention provides a method of measuring a shape of a target surface, including a step of obtaining shape data by causing a stage which holds the target surface to rotate the target surface about a rotation axis, positioning each of a plurality of partial regions of the target surface in a field of view of a measurement apparatus, and causing the measurement apparatus to measure each of the plurality of partial regions, a step of obtaining, for each of a plurality of partial contour regions, a central position of the target surface using data of a contour included in the shape data, and a step of obtaining, based on the obtained plurality of central positions, a position of the rotation axis of the target surface in positioning each of the plurality of partial regions.

Find Patent Forward Citations

Oshima, Yuki. (2015). Measurement method, measurement apparatus, non-transitory computer-readable storage medium, and optical element fabrication method (U.S. Patent No. 9128004). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9128004

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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