The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Nov. 13, 2009
Applicants:

Martin Rueffer, Amberg, DE;

Stefan Rosiwal, Bamberg, DE;

Christian Bareiss, Aachen, DE;

Walter Reichert, Aachen, DE;

Oliver Lemmer, Aachen, DE;

Marc Perle, Forchheim, DE;

Inventors:

Martin Rueffer, Amberg, DE;

Stefan Rosiwal, Bamberg, DE;

Christian Bareiss, Aachen, DE;

Walter Reichert, Aachen, DE;

Oliver Lemmer, Aachen, DE;

Marc Perle, Forchheim, DE;

Assignees:

DIACCON GMBH, Fuerth, DE;

CEMECON AG, Wuerselen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/27 (2006.01); C23C 16/24 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/278 (2013.01); C23C 16/24 (2013.01); C23C 16/271 (2013.01); C23C 16/273 (2013.01); H01L 21/67115 (2013.01); H01L 21/67098 (2013.01);
Abstract

The invention relates to a device for coating a substrate () using CVD, in particular for coating with diamond or silicon, wherein a heat conductor array comprising a plurality of elongated heat conductors () is provided in a housing (), said heat conductors extending between a first () and a second electrode (), wherein the heat conductors () are held individually tensioned by a tensioning device attached to one end thereof. For the purposes of improving the life of the heat conductors (), the invention proposes that the tensioning device comprises a tilt arm () having a tensioning weight (G), the heat conductor () being attached to the first end (E) of said tilt arm, and the second end thereof substantially being mounted pivotably about a horizontal axis (H).


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