Implantable biocompatible component integrating an active sensor for measurement of a physiological parameter, a micro-electromechanical system or an integrated circuit

Abstract

An implantable biocompatible component () integrating an active element of the type of a sensor for the measurement of a physiologic parameter, a micro-electromechanical system and an integrated electronic circuit. This component () has a substrate () and a lid () in silicon or quartz. The substrate () integrates the active element () and biocompatible metallic pads (), electrically connected to the active element. The lid () encompasses and peripherally closes the substrate in a hermetic manner, level with the face integrating the active element. This component is void of metallic case for insulation between the active element and outside environment, and of insulative feedthrough for electrical connection to the active element. The substrate and lid can be directly welded to each other through their faces in vis-à-vis, or by interpositioning a sealing ring made of a biocompatible material.