The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Mar. 25, 2014
Omron Corporation, Kyoto-shi, Kyoto, JP;
Masaaki Kasai, Shiga, JP;
OMRON Corporation, Kyoto, JP;
Abstract
A microphone has a base substrate comprising a main surface, an acoustic sensor mounted on the main surface, and a circuit element stacked on the acoustic sensor. A hollow space is formed between the acoustic sensor and the circuit element. The acoustic sensor has a sensor substrate having a first surface opposed to the base substrate, a second surface on a side opposite to the first surface, and a cavity formed while recessed with respect to the second surface, and a movable electrode that covers the cavity from the second surface side. A through-hole is formed in the base substrate while piercing the base substrate in a thickness direction. A communication hole is formed in the sensor substrate while piercing the sensor substrate from the first surface to the second surface. The communication hole causes the through-hole and the hollow space to communicate with each other.