The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Jun. 18, 2013
Applicant:
Hermes-epitek Corporation, Taipei, TW;
Inventors:
Chien-Ping Huang, Tainan County, TW;
Tsan-Hua Huang, Tainan, TW;
Assignee:
Hermes-Epitek Corporation, Taipei, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/465 (2006.01); B05B 1/14 (2006.01); B23P 15/16 (2006.01); B05B 1/18 (2006.01); H01L 21/46 (2006.01); H01L 21/4757 (2006.01);
U.S. Cl.
CPC ...
B05B 1/185 (2013.01); B23P 15/16 (2013.01); H01L 21/46 (2013.01); H01L 21/465 (2013.01); H01L 21/4757 (2013.01); Y10T 29/49432 (2015.01); Y10T 29/49433 (2015.01);
Abstract
A showerhead is disclosed in this invention. The showerhead includes a bottom portion, at least one plate, and a top portion. The bottom portion includes a plurality of gas tubes which are integratedly formed on the bottom portion. The gas tubes include at least one first gas tube. The at least one plate includes a first plate. The first plate includes a plurality of first openings, wherein the gas tubes pass through the first openings. The top portion is coupled to the bottom portion for forming at least one inner space.