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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9125295 B1

PDFFull Text
Date of Patent:
Sep. 01, 2015

Filed:

Oct. 25, 2013

Substrate separation apparatus and method

Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Seung Jun Lee, Yongin-si, KR;

Young Woo Lee, Gwangmyeong-si, KR;

Joon Hyung Kim, Hwaseong-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., , KR;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Philip Tucker

Assistant Examiner:

Nickolas Harm

Int. Cl.
CPC ...
B32B 38/10 (2006.01); H05K 3/00 (2006.01); H01L 21/683 (2006.01); H01L 21/70 (2006.01); H01L 51/00 (2006.01); B32B 38/18 (2006.01); B32B 43/00 (2006.01); G02F 1/13 (2006.01); G02F 1/1333 (2006.01);
U.S. Cl.
CPC ...
H05K 3/007 (2013.01); B32B 38/10 (2013.01); B32B 38/1858 (2013.01); H01L 21/6835 (2013.01); H01L 21/707 (2013.01); H01L 51/003 (2013.01); B32B 43/006 (2013.01); B32B 2457/20 (2013.01); B32B 2457/206 (2013.01); G02F 1/1303 (2013.01); G02F 1/133305 (2013.01); H05K 2203/0147 (2013.01); Y10T 156/1168 (2015.01); Y10T 156/1184 (2015.01); Y10T 156/1961 (2015.01); Y10T 156/1967 (2015.01); Y10T 156/1978 (2015.01);
Abstract

An apparatus for separating a first substrate and a second substrate which are in contact with each other, includes an upper transfer part which fixes the first substrate and transfers the first substrate in a positive X-axis direction in an XY coordinate system comprised of an X axis and an Y axis which perpendicularly intersect each other and a lower transfer part which is disposed under the upper transfer part with a gap therebetween and fixes and transfers the second substrate, wherein the lower transfer part comprises a first transfer section which transfers the second substrate in the positive X-axis direction, and a second transfer section which transfers the second substrate in the positive X-axis direction as well as a negative Y-axis direction.

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