The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Mar. 12, 2013
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Yutaka Unno, Handa, JP;
Junya Waki, Handa, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 (2006.01); C23C 16/00 (2006.01); H01L 21/67 (2006.01); H05B 3/28 (2006.01); H05B 1/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67103 (2013.01); H01L 21/68792 (2013.01); H05B 1/0233 (2013.01); H05B 3/283 (2013.01);
Abstract
A heating deviceincludes a ceramic basea resistance heating elementand a hollow shaftThe ceramic baseincludes a central portionand a peripheral portionThe resistance heating elementis designed in such a manner that the density of heating in the central portionis 1.4 to 2.0 times that in the peripheral portionThe hollow shaftincludes a first sectionand a second sectionThe thickness tbof the first sectionis 6 to 10 mm. The thickness tbof the second sectionis 0.3 to 0.5 times the thickness tbof the first sectionThe length of the first section 41 is 0.4 to 0/8 times the overall length of the hollow shaft 40.