The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Nov. 05, 2013
Applicant:
First Solar, Inc., Perrysburg, OH (US);
Inventors:
Arnold Allenic, San Jose, CA (US);
Stephan Paul George, II, Perrysburg, OH (US);
Sreenivas Jayaraman, Perrysburg, OH (US);
Oleh Petro Karpenko, Richmond, CA (US);
Chong Lim, Holland, OH (US);
Assignee:
FIRST SOLAR, INC, Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/66 (2006.01); G01B 11/06 (2006.01); G01N 21/84 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01B 11/0683 (2013.01); G01N 21/8422 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A metrology system for gauging and spatially mapping a semiconductor material on a substrate can be used in controlling deposition and thermal activation processes.