The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2015

Filed:

Aug. 22, 2013
Applicant:

Advantech Global, Ltd, Tortola, VG;

Inventor:

Nobuhiko Tamura, Murrysville, PA (US);

Assignee:

Advantech Global, LTD, Tortola, VG;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G03F 9/00 (2006.01); C23C 14/04 (2006.01); C23C 16/04 (2006.01);
U.S. Cl.
CPC ...
G03F 9/7049 (2013.01); C23C 14/042 (2013.01); C23C 16/042 (2013.01);
Abstract

In a shadow mask-substrate alignment method, a light source, a beam splitter, a first substrate including a first grate, a second substrate including a second grate, and a light receiver are positioned relative to each other to define a light path that includes light output by the light source being reflected a first time by the beam splitter. The light reflected the first time passes through the first or second grate and is at least partially reflected a second time by the second or first grate back through the first or the second grate, respectively. The light reflected the second time passes at least partially through the beam splitter for receipt by the light receiver. The orientation of the first substrate, the second substrate or both is adjusted to position the first grate, the second grate, or both until a predetermined amount is received by the light receiver.


Find Patent Forward Citations

Loading…