The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Sep. 29, 2014
Ushio Denki Kabushiki Kaisha, Tokyo-to, JP;
Zbigniew Pawlowski, Kobylanka, PL;
Jozef Antonius Willem Maria Corver, Nuenen, NL;
Roy Mohede, Cologne, DE;
Zenon Zajaczkowski, Dolaszewo, PL;
Marcel Kennis, Brunssum, NL;
USHIO Denki Kabushiki Kaisha, Tokyo-to, JP;
Abstract
A radiation source is provided for generating short-wavelength radiation from plasma in which a molten liquid metal is used as a source material. In the radiation source having a revolving element for providing the source material, unused source material exiting from the plasma zone has to be reliably collected to prevent impairments of the radiation source through unused source material. This aim is met in that a receptacle for the unused source material is constructed as a catch trough having a trough opening below the plasma zone and the molten bath in direction of gravity force as well as an inclined side wall to catch the source material and concentrate it in a deepest catch trough area. A heating element and at least one temperature sensor are fastened to the catch trough for heating the source material and controlling its temperature above its melting temperature.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile