The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Aug. 29, 2012
Fumiharu Teramae, Nagoya, JP;
Koichi Naniwae, Nagoya, JP;
Tsukasa Kitano, Nagoya, JP;
Toshiyuki Kondo, Nagoya, JP;
Atsushi Suzuki, Nagoya, JP;
Midori Mori, Nagoya, JP;
Fumiharu Teramae, Nagoya, JP;
Koichi Naniwae, Nagoya, JP;
Tsukasa Kitano, Nagoya, JP;
Toshiyuki Kondo, Nagoya, JP;
Atsushi Suzuki, Nagoya, JP;
Midori Mori, Nagoya, JP;
EL-SEED CORPORATION, Nagoya-Shi, Aichi, JP;
Abstract
[Problem] A problem is to provide a method of manufacturing a glass substrate with a concave-convex film using dry etching capable of giving a fine concave-convex structure precisely by dry etching, a glass substrate with a concave-convex structure, a solar cell, and a method of manufacturing a solar cell. [Means to Solve the Problem] In order to give a concave-convex structure to a glass substrate made of a plurality of oxides placed in different vapor pressures during dry etching, a subject film forming step and a concave-convex structure forming step are provided. The subject film forming step forms a subject film made of a single material on a flat surface of the glass substrate. The concave-convex structure forming step forms a periodic concave-convex structure in a surface of the subject film by dry etching. As a result, a fine concave-convex structure is formed precisely by dry etching.