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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9117768 B1

PDFFull Text
Date of Patent:
Aug. 25, 2015

Filed:

Jan. 06, 2014

Display substrate having a thin film transistor and method of manufacturing the same

Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventors:

Ki-Hyun Cho, Suwon-si, KR;

Jeong-Won Kim, Seoul, KR;

Kwang-Woo Park, Hwaseong-si, KR;

Chul-Won Park, Gwangmyeong-si, KR;

Assignee:

SAMSUNG DISPLAY CO., LTD., , KR;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Eduardo A Rodela

Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 27/12 (2006.01); H01L 27/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31116 (2013.01); H01L 21/31105 (2013.01); H01L 21/31111 (2013.01); H01L 27/127 (2013.01); H01L 27/1225 (2013.01); H01L 27/1248 (2013.01); H01L 27/326 (2013.01); H01L 27/3244 (2013.01); H01L 27/3248 (2013.01); H01L 27/3258 (2013.01); H01L 27/3262 (2013.01); H01L 27/3276 (2013.01);
Abstract

In a method for manufacturing a display substrate, a thin film transistor is formed on a base substrate. The thin film transistor includes a gate electrode, an active pattern, a source electrode and a drain electrode. A first passivation layer is formed to cover the thin film transistor. A second passivation layer is formed on the first passivation layer. A photoresist pattern is formed to partially expose the second passivation layer. The first passivation layer and the second passivation layer are partially removed to form a contact hole exposing the drain electrode. A pixel electrode layer is formed on the second passivation layer, the drain electrode and the photoresist pattern. A portion of the pixel electrode layer and the second photoresist pattern are removed to form a pixel electrode. The portion of the pixel electrode layer is disposed on a top surface and a sidewall of the photoresist pattern.

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