The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Nov. 06, 2006
Goetz Teschner, Dresden, DE;
Falk Milde, Dresden, DE;
Enno Mirring, Arnsdorf OT Kleinwolmsdorf, DE;
Frank Meissner, Coswig, DE;
Goetz Grosser, Dresden, DE;
Goetz Teschner, Dresden, DE;
Falk Milde, Dresden, DE;
Enno Mirring, Arnsdorf OT Kleinwolmsdorf, DE;
Frank Meissner, Coswig, DE;
Goetz Grosser, Dresden, DE;
VON ARDENNE GmbH, Dresden, DE;
Abstract
A method is provided for coating a substrate with the aid of a magnetron cathode and two electrodes which are alternately impinged upon by a positive potential and a negative potential. Also disclosed is an assembly for coating a substrate, comprising a vacuum chamber, a magnetron cathode, two electrodes, and a voltage source. A negative potential is generated at a level that is no greater than the level of the cathode potential, thus preventing the electrode that is to be cleaned from being stripped to a greater extent than the same was coated in the previous half-wave. The magnetron cathode and the electrodes are connected to the voltage source via switching elements without being galvanically such that a negative and a positive voltage generated from the voltage source can be alternatively applied to the electrodes, the level of said voltage being no greater than the cathode voltage.