The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Dec. 26, 2013
Applicant:
Northeastern University, Boston, MA (US);
Inventors:
Sivasubramanian Somu, Natick, MA (US);
Ahmed Busnaina, Needham, MA (US);
Nicol McGruer, Dover, MA (US);
Peter Ryan, Waltham, MA (US);
George G. Adams, West Newton, MA (US);
Xugang Xiong, Boston, MA (US);
Taehoon Kim, Revere, MA (US);
Assignee:
Northeastern University, Boston, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01H 11/04 (2006.01); B82Y 10/00 (2011.01); G11C 11/50 (2006.01); G11C 13/02 (2006.01); H01L 51/05 (2006.01); H01L 51/00 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01H 11/04 (2013.01); B82Y 10/00 (2013.01); G11C 11/50 (2013.01); G11C 13/025 (2013.01); H01L 51/0575 (2013.01); B82Y 40/00 (2013.01); G11C 2213/16 (2013.01); H01L 51/0048 (2013.01); H01L 51/0591 (2013.01); Y10S 977/89 (2013.01); Y10S 977/943 (2013.01);
Abstract
A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.