The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Oct. 15, 2012
Koninklijke Philips N.v., Eindhoven, NL;
Peter Dirksen, Valkenswaard, NL;
Ronald Dekker, Valkenswaard, NL;
Vincent Adrianus Henneken, Utrecht, NL;
Adriaan Leeuwestein, Heeze, NL;
Bout Marcelis, Eindhoven, NL;
John Douglas Fraser, Woodinville, WA (US);
Koninklijke Philips N.V., Eindhoven, NL;
Abstract
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell () comprising a substrate (), and a membrane () disposed above a total membrane area ((A), wherein a cavity () is formed between the membrane () and the substrate (), the membrane () comprising a hole () and an edge portion () surrounding the hole (), the edge portion () of the membrane () being collapsed to the substrate (). The cell further comprises a plug () arranged in the hole () of the membrane (), the plug () being located only in a subarea (A) of the total membrane area (A). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell ().