The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2015

Filed:

May. 10, 2011
Applicants:

Takayuki Hirano, Kobe, JP;

Takashi Kobori, Kobe, JP;

Inventors:

Takayuki Hirano, Kobe, JP;

Takashi Kobori, Kobe, JP;

Assignees:

Kobe Steel, Ltd., Kobe-shi, JP;

KOBELCO RESEARCH INSTITUTE, INC., Kobe-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/00 (2006.01); G01R 1/067 (2006.01); G01R 35/00 (2006.01); G01R 3/00 (2006.01);
U.S. Cl.
CPC ...
G01R 1/06761 (2013.01); G01R 3/00 (2013.01); G01R 35/00 (2013.01);
Abstract

A contact probe includes a base material, a carbon film provided on a tip of the contact probe and configured to contact with an electrode, and an intermediate layer provided between the carbon film and the base material. The carbon film includes a metal element. A concentration of the metal element in the carbon film surface is lower than an average concentration of the metal element in a whole of the carbon film. The carbon film further includes: a plurality of layers, each of the plurality of layers having a uniform concentration of the metal element along a direction of a thickness of the carbon film; a layer in which the concentration of the metal element is continuously changed along a direction of a thickness of the carbon film; or both thereof.


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