The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2015

Filed:

Nov. 11, 2013
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Kazushige Utsumi, Sagamihara, JP;

Kazuya Tsujino, Tokyo, JP;

Kazuyuki Ueda, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2006.01); H05G 1/70 (2006.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); H05G 1/70 (2013.01); G01N 2223/204 (2013.01); H01J 2235/186 (2013.01);
Abstract

A multi-radiation unit includes: a multi-radiation tube which has a plurality of electron sources, a plurality of targets and an intermediate electrode having openings through which electrons emitted from the electron sources pass; a selection circuit that allows electrons to be emitted from a selected electron source selected from the plurality of electron sources; an intermediate electrode potential defining unit that defines a potential of the intermediate electrode; a storage unit that stores, for each of the plurality of electron sources, an electrostatic control condition of the intermediate electrode for obtaining a predetermined irradiated state of a target corresponding to the selected electron source; and a changing unit that changes, when electrons are emitted from the selected electron source, the electrostatic control condition of the intermediate electrode based on the electrostatic control condition stored in the storage unit for the selected electron source.


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