The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 25, 2015

Filed:

Dec. 27, 2012
Applicant:

King Yuan Electronics Co., Ltd, Hsin-Chu, TW;

Inventor:

Wei-Jen Cheng, Hsin-Chu, TW;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 27/00 (2006.01);
U.S. Cl.
CPC ...
G01L 27/00 (2013.01);
Abstract

A built-in self-test structure for a pressure tester and a method thereof are provided. The built-in self-test structure includes a substrate, a plurality of membrane layers, a fixing portion, an electrical heating unit and a sensing circuit unit. The membrane layers are formed on the substrate. The fixing portion is configured on the membrane layers and includes a notch. The notch and the membrane layers define a cavity. The electrical heating unit is configured on one membrane layer, and the sensing circuit unit is configured on another membrane layer. The electrical heating unit heats up to increase the pressure in the cavity according to an input voltage, so that the membrane layers have a small deformation. The sensing circuit unit outputs a test signal according to the small deformation.


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