The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Aug. 30, 2012
Yoichiro Tabata, Tokyo, JP;
Shinichi Nishimura, Tokyo, JP;
Noriyuki Nakamura, Tokyo, JP;
Yujiro Okihara, Tokyo, JP;
Yoichiro Tabata, Tokyo, JP;
Shinichi Nishimura, Tokyo, JP;
Noriyuki Nakamura, Tokyo, JP;
Yujiro Okihara, Tokyo, JP;
Abstract
In the present invention, a gas flow rate adjustment apparatus that outputs a raw material gas to an ozone generation apparatus is provided. The gas flow rate adjustment apparatus includes a plurality of flow rate adjustment parts, and outputs a second mixed gas serving as the raw material gas to the ozone generation apparatus. The second mixed gas includes an oxygen gas outputted from a first oxygen flow rate adjustment part and a first mixed gas outputted from a mixed gas flow rate adjustment part. The raw material gas generated by the gas flow rate adjustment apparatus, which includes an oxygen gas and a nitrogen gas, contains the nitrogen gas added to the oxygen gas with the rate of addition being in a range of more than 0 PPM and not more than 100 PPM.