The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9112152 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 18, 2015

Filed:

Jun. 06, 2011
Applicants:

Katrin Benkert, München, DE;

Hermann Bödinger, München, DE;

Stefan Denneler, München, DE;

Harald Johannes Kastl, Fichtelberg, DE;

Andreas Lenk, Bannewitz Ot Possendorf, DE;

Carsten Schuh, Baldham, DE;

Inventors:

Katrin Benkert, München, DE;

Hermann Bödinger, München, DE;

Stefan Denneler, München, DE;

Harald Johannes Kastl, Fichtelberg, DE;

Andreas Lenk, Bannewitz Ot Possendorf, DE;

Carsten Schuh, Baldham, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/273 (2013.01); H01L 41/293 (2013.01); H01L 41/083 (2006.01); H01L 41/27 (2013.01);
U.S. Cl.
CPC ...
H01L 41/273 (2013.01); H01L 41/083 (2013.01); H01L 41/27 (2013.01); H01L 41/293 (2013.01); Y10T 29/42 (2015.01);
Abstract

A method for producing a piezo actuator includes: providing a green stack including alternately successive green films and inner electrode layers; forming trenches on the outside green stack in areas in which the inner electrode layers are intended to be electrically insulated from the corresponding outer electrodes, the trenches shortening the inner electrode layers from the outside of the green stack toward the inside; filling the trenches with an electrically insulating slurry; further processing the green stack, including filling the trenches with slurry, such that the green films produce piezo electric layers and the green stack produces a piezo stack; mounting two outer electrodes on the outside of the piezo stack, such that the two outer electrodes are alternately electrically connected to the inner electrode layers. The trenches may be filled with the slurry using one of the following methods; screen printing, immersion, spraying, or vacuum infiltration.


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