The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Feb. 26, 2013
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventor:
Tomoyuki Takahashi, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/00 (2006.01); H01L 41/047 (2006.01); H03H 9/54 (2006.01); H03H 9/58 (2006.01); H01L 41/29 (2013.01); H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/60 (2006.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); H01L 41/29 (2013.01); H03H 9/02228 (2013.01); H03H 9/54 (2013.01); H03H 9/58 (2013.01); H03H 9/605 (2013.01); H03H 2003/021 (2013.01); Y10T 29/42 (2015.01);
Abstract
A resonator according to the present invention includes a supporting substrate, a piezoelectric layer, a pair of excitation electrodes, and a bonding layer. The piezoelectric layer is made of a piezoelectric material. The pair of excitation electrodes is formed on the upper surface of the piezoelectric layer so as to excite bulk acoustic waves. The bonding layer has a cavity formed therein so as to face the excitation electrode pair through the piezoelectric layer, and the bonding layer bonds the supporting substrate to the lower surface of the piezoelectric layer.