The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Dec. 08, 2011
Applicants:
Sung Jin Whang, Seoul, KR;
Ki Hong Lee, Gyeonggi-do, KR;
Inventors:
Sung Jin Whang, Seoul, KR;
Ki Hong Lee, Gyeonggi-do, KR;
Assignee:
SK Hynix Inc., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 29/788 (2006.01); H01L 21/764 (2006.01); H01L 27/115 (2006.01); H01L 29/792 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7889 (2013.01); H01L 21/764 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01); H01L 29/7926 (2013.01); H01L 29/78642 (2013.01);
Abstract
A three-dimensional (3-D) non-volatile memory device includes a plurality of word line structures extended in parallel and including a plurality of interlayer dielectric layers and a plurality of word lines that are alternately stacked over a substrate, a plurality of channels protruding from the substrate configured to penetrate the plurality of interlayer dielectric layers and the plurality of word lines, and an air gap formed between the plurality of word line structures.