The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Apr. 12, 2010
Applicants:
Shoichi Mori, Tokyo, JP;
Hirofumi Nakamura, Tokyo, JP;
Inventors:
Shoichi Mori, Tokyo, JP;
Hirofumi Nakamura, Tokyo, JP;
Assignee:
HIRATA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/67259 (2013.01); H01L 21/67265 (2013.01);
Abstract
A wafer carrier measuring jig includes a base member having a carrier placement section where three kinematic pins are disposed in correspondence with three V-shaped grooves provided on the bottom surface of a wafer carrier having a pair of slot sections where wafers are accommodated. Sensors are provided for measuring height from a predetermined reference value, slot pitch, and slot horizontality with respect to at least some slots in the two slot sections. The obtained data of the slot horizontality and the slot heights of each slot section is written into ID information storage.