The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2015

Filed:

Jun. 17, 2014
Applicants:

Samsung Display Co, Ltd., Yongin, KR;

Dongwoo Fine-chem Co., Ltd., Iksan-si, Jeollabuk-do, KR;

Inventors:

Hong-Sick Park, Suwon-si, KR;

Wang-Woo Lee, Suwon-si, KR;

Sang-Tae Kim, Iksan-si, KR;

Joon-Woo Lee, Jeonju-si, KR;

Young-Chul Park, Iksan-si, KR;

Young-Jun Jin, Iksan-si, KR;

Kyong-Min Kang, Iksan-si, KR;

Young-Jin Yoon, Jeonju-si, KR;

Suck-Jun Lee, Jeonju-si, KR;

O-Byoung Kwon, Wanju-gun, KR;

In-Ho Yu, Iksan-si, KR;

Sang-Hoon Jang, Jeonju-si, KR;

Min-Ki Lim, Iksan-si, KR;

Dong-Ki Kim, Cheongju-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 27/12 (2006.01); H01L 21/3213 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 27/127 (2013.01); H01L 21/32134 (2013.01); H01L 27/124 (2013.01); H01L 27/1259 (2013.01); H01L 29/41733 (2013.01);
Abstract

An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.


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