The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Jan. 19, 2011
Reinhard Neul, Stuttgart, DE;
Christian Rettig, Reutlingen, DE;
Achim Trautmann, Leonberg, DE;
Daniel Christoph Meisel, Vaihingen An der Enz, DE;
Alexander Buhmann, Reutlingen, DE;
Manuel Engesser, Buehl, DE;
Ando Feyh, Palo Alto, CA (US);
Reinhard Neul, Stuttgart, DE;
Christian Rettig, Reutlingen, DE;
Achim Trautmann, Leonberg, DE;
Daniel Christoph Meisel, Vaihingen An der Enz, DE;
Alexander Buhmann, Reutlingen, DE;
Manuel Engesser, Buehl, DE;
Ando Feyh, Palo Alto, CA (US);
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.