The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Oct. 28, 2012
Xiangyou Yang, Chengdu, CN;
Yong Feng, Chengdu, CN;
Sugang Jiang, Chengdu, CN;
Chih-chang Chen, Cupertino, CA (US);
Liji Huang, San Jose, CA (US);
Xiangyou Yang, Chengdu, CN;
Yong Feng, Chengdu, CN;
Sugang Jiang, Chengdu, CN;
Chih-Chang Chen, Cupertino, CA (US);
Liji Huang, San Jose, CA (US);
M-Tech Instrument Corporation (holding) Limited, Hong Kong, HK;
Abstract
This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.