The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Aug. 25, 2011
Applicants:
Jong Kwang Whang, Yongin, KR;
Sung Gyu Kim, Yongin, KR;
Inventors:
Jong Kwang Whang, Yongin, KR;
Sung Gyu Kim, Yongin, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., Yongin, Gyeonggi-Do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24C 7/00 (2006.01); B24C 1/04 (2006.01); B24C 3/04 (2006.01);
U.S. Cl.
CPC ...
B24C 7/0038 (2013.01); B24C 1/045 (2013.01); B24C 3/04 (2013.01); B24C 7/0084 (2013.01);
Abstract
Provided is a substrate processing apparatus including a first conduit configured to supply a processing solution to a substrate loaded on a supporter, and a second conduit in fluid communication with the first conduit, the second conduit configured to supply a gas to the first conduit to be mixed with the processing solution, wherein the first conduit includes an opening to permit the processing solution mixed with the gas to be injected onto the substrate.