The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Oct. 11, 2013
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Ali Afzali-Ardakani, Ossining, NY (US);

Bhupesh Chandra, Jersey City, NJ (US);

George Stojan Tulevski, White Plains, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 51/05 (2006.01); B82Y 10/00 (2011.01); H01L 51/00 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
H01L 51/0558 (2013.01); B82Y 10/00 (2013.01); H01L 51/002 (2013.01); H01L 51/0072 (2013.01); H01L 51/055 (2013.01); B82Y 40/00 (2013.01); H01L 51/0018 (2013.01); H01L 51/0048 (2013.01); Y10S 977/846 (2013.01); Y10S 977/938 (2013.01);
Abstract

A composition and method for forming a field effect transistor with a stable n-doped nano-component. The method includes forming a gate dielectric on a gate, forming a channel comprising a nano-component on the gate dielectric, forming a source over a first region of the nano-component, forming a drain over a second region of the nano-component to form a field effect transistor, and exposing a portion of a nano-component of a field effect transistor to dihydrotetraazapentacene, wherein dihydrotetraazapentacene is represented by the formula: wherein each of R1, R2, R3, and R4 comprises one of hydrogen, an alkyl group of C1 to C16 carbons, an alkoxy group, an alkylthio group, a trialkylsilane group, a hydroxymethyl group, a carboxylic acid group and a carboxylic ester group.


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