The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Dec. 12, 2011
Applicants:

Daniel N. Carothers, Oro Valley, AZ (US);

Rick L. Thompson, Amherst, NH (US);

Inventors:

Daniel N. Carothers, Oro Valley, AZ (US);

Rick L. Thompson, Amherst, NH (US);

Assignee:

SCHILMASS CO. L.L.C., Wilmington, DE (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 51/00 (2006.01); B82Y 10/00 (2011.01); C23C 10/02 (2006.01); C23C 16/04 (2006.01); C23C 16/26 (2006.01); C23C 16/48 (2006.01); C23C 26/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0015 (2013.01); B82Y 10/00 (2013.01); C23C 10/02 (2013.01); C23C 16/042 (2013.01); C23C 16/26 (2013.01); C23C 16/483 (2013.01); C23C 26/00 (2013.01); H01L 51/002 (2013.01); H01L 51/0048 (2013.01);
Abstract

A system is provided for the manufacture of carbon based electrical components including, an ultraviolet light source; a substrate receiving unit whereby a substrate bearing a first layer of carbon based semiconductor is received and disposed beneath the ultraviolet light source; a mask disposed between the ultraviolet light source and the carbon based semiconductor layer; a doping agent precursor source; and environmental chemical controls, configured such that light from the ultraviolet light source irradiates a doping agent precursor and the first carbon layer.


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