The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

May. 23, 2012
Applicants:

David H. Redinger, Afton, MN (US);

Robert J. Devoe, Mahtomedi, MN (US);

Belma Erdogan-haug, St. Paul, MN (US);

Inventors:

David H. Redinger, Afton, MN (US);

Robert J. DeVoe, Mahtomedi, MN (US);

Belma Erdogan-Haug, St. Paul, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/20 (2006.01); A61M 37/00 (2006.01); G03F 7/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/004 (2013.01); A61M 37/0015 (2013.01); G03F 7/0047 (2013.01); G03F 7/027 (2013.01); G03F 7/20 (2013.01); G03F 7/70375 (2013.01); A61M 2037/003 (2013.01); A61M 2037/0053 (2013.01);
Abstract

Compositions such as photoresists and microfabrication processes are provided that can produce high-fidelity microfabricated structures. The provided photoresists can have reduced swelling during the development phase and can give tight tolerances for products, such as microneedles, that can be used, for example, in the medical field. The provided compositions include a photoresist, a photoinitiator system dispersed in the photoresist, and a polymer-tethered nanoparticle dispersed in the photoresist. The photoresist can be a negative photoresist and the photoinitiator system can include a two-photoinitiator system. The polymer-tethered nanoparticle can include an acrylic polymer and, in some embodiments, can include poly(methyl methacrylate). The nanoparticles can include silica.


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