The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Apr. 27, 2010
Applicant:

Hanno Hammer, Graz-Lebring, AT;

Inventor:

Hanno Hammer, Graz-Lebring, AT;

Assignee:

Maxim Integrated Products, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01C 19/56 (2012.01); B81B 3/00 (2006.01); G01C 19/5712 (2012.01);
U.S. Cl.
CPC ...
G01P 15/08 (2013.01); B81B 3/007 (2013.01); G01C 19/5712 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/056 (2013.01); G01P 2015/0817 (2013.01);
Abstract

A micromechanical sensor comprising a substrate () and at least one mass () which is situated on the substrate () and which moves relative to the substrate () is used to detect motions of the sensor based on an acceleration force and/or Coriolis force which occur(s). The mass () and the substrate () and/or two masses which move toward one another are connected by at least one bending spring device () for a relative rotational motion. The bending spring device () has multiple, in particular two, spring bars () extending essentially parallel to one another for improving the linear spring characteristic of the bending spring device during the rotational motion, and at least one meander () on at least one, preferably on all, of the spring bars ().


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