The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Nov. 09, 2012
Applicant:
Tsmc Solar Ltd., Taichung, TW;
Inventors:
Assignee:
TSMC Solar Ltd., Taichung, unknown;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 14/54 (2006.01); C23C 14/24 (2006.01); C23C 14/50 (2006.01); C23C 14/56 (2006.01); C23C 14/00 (2006.01); C23C 14/58 (2006.01); C23C 14/04 (2006.01);
U.S. Cl.
CPC ...
C23C 14/54 (2013.01); C23C 14/00 (2013.01); C23C 14/044 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); C23C 14/3464 (2013.01); C23C 14/505 (2013.01); C23C 14/541 (2013.01); C23C 14/56 (2013.01); C23C 14/564 (2013.01); C23C 14/568 (2013.01); C23C 14/5806 (2013.01);
Abstract
Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.