The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Nov. 23, 2010
Mariana Munteanu, Santa Clara, CA (US);
Brian Josef Bartholomeusz, Palo Alto, CA (US);
Michael Bartholomeusz, Phoenix, AZ (US);
Erol Girt, Burnaby, CA;
Mariana Munteanu, Santa Clara, CA (US);
Brian Josef Bartholomeusz, Palo Alto, CA (US);
Michael Bartholomeusz, Phoenix, AZ (US);
Erol Girt, Burnaby, CA;
ZETTA RESEARCH AND DEVELOPMENT LLC—AQT SERIES, Wilmington, DE (US);
Abstract
In one example embodiment, a sputter target structure for depositing semiconducting chalcogenide films is described. The sputter target includes a target body having a target body composition that comprises Cu(SeSTe), wherein the value of x is greater than or equal to approximately 0.5, the value of y is between approximately 0 and approximately 1, the value of z is between approximately 0 and approximately 1, and the total amount of Se, S, and Te phases in the target body composition comprise less than 50 volume percent of the target body composition.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile