The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Jun. 10, 2013
Texas Instruments Incorporated, Dallas, TX (US);
Virgil C. Ararao, Plano, TX (US);
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Abstract
A hermetically packaged microelectromechanical system (MEMS) device has a substrate with an assembly pad () and a plurality of terminals (); a chip () with a MEMS mechanical element () of a first height () assembled on the pad and connected to the terminals by wires () with an insulating coat (); a ridge () on the substrate, which surrounds the MEMS element () with a second height () greater than the first height and comprises a plastic compound () filled with particles () and a surface () having an adhering moisture-impermeable seal layer (); and a moisture-impervious lid () attached to the ridge by moisture-proof bonds (), sealing the volume () enclosed by the lid, the chip, and the metalized ridge as a hermetic space for the MEMS element ().