The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Sep. 26, 2012
Applicants:

National Research Council of Canada, Ottawa, CA;

The Governors of the University of Alberta, Edmonton, CA;

Inventors:

Jason L. Pitters, Edmonton, CA;

Radovan Urban, Edmonton, CA;

Robert A Wolcow, Edmonton, CA;

Assignees:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B82Y 35/00 (2011.01); B44C 1/22 (2006.01); G01Q 70/16 (2010.01); B82Y 10/00 (2011.01);
U.S. Cl.
CPC ...
B44C 1/227 (2013.01); B82Y 35/00 (2013.01); G01Q 70/16 (2013.01); B82Y 10/00 (2013.01); H01J 2237/2818 (2013.01); H01J 2237/3174 (2013.01); H01J 2237/31749 (2013.01); Y10S 977/888 (2013.01);
Abstract

A nanotip, is fabricated by modifying a precursor nanotip having an apex and a shank by applying an electric field in the presence of a reactive gas to perform field-assisted etching wherein atoms are preferentially removed from the shank by chemical interaction with the reactive gas, and controlling the reactive gas pressure and/or tip voltage to vary the electric field so as to promote field evaporation of apex atoms during fabrication of the nanotip and thereby control the overall profile of the resulting nano-tip. The method permits shaping of the overall tip profile.


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