The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Jul. 21, 2014
Applicant:

Rofin-sinar Technologies Inc., Plymouth, MI (US);

Inventor:

S. Abbas Hosseini, Orlando, FL (US);

Assignee:

ROFIN-SINAR TECHNOLOGIES INC., Plymouth, MI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/00 (2006.01); B23K 26/06 (2014.01); B23K 26/08 (2014.01); B23K 26/40 (2014.01); C03C 14/00 (2006.01); H01L 21/78 (2006.01); B23K 26/00 (2014.01); B23K 26/38 (2014.01); C03B 33/09 (2006.01);
U.S. Cl.
CPC ...
B23K 26/0626 (2013.01); B23K 26/0039 (2013.01); B23K 26/0057 (2013.01); B23K 26/0635 (2013.01); B23K 26/0648 (2013.01); B23K 26/0807 (2013.01); B23K 26/38 (2013.01); B23K 26/409 (2013.01); B23K 26/4075 (2013.01); C03B 33/09 (2013.01); C03C 14/002 (2013.01); H01L 21/78 (2013.01); B23K 2203/00 (2013.01); C03C 2214/02 (2013.01);
Abstract

Systems and methods are described for forming continuous laser filaments in transparent materials. A burst of ultrafast laser pulses is focused such that a beam waist is formed external to the material being processed without forming an external plasma channel, while a sufficient energy density is formed within an extended region within the material to support the formation of a continuous filament, without causing optical breakdown within the material. Filaments formed according to this method may exhibit lengths exceeding 10 mm. In some embodiments, an aberrated optical focusing element is employed to produce an external beam waist while producing distributed focusing of the incident beam within the material. Various systems are described that facilitate the formation of filament arrays within transparent substrates for cleaving/singulation and/or marking. Optical monitoring of the filaments may be employed to provide feedback to facilitate active control of the process.


Find Patent Forward Citations

Loading…