The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Nov. 16, 2006
Kenichi Muramatsu, Hamamatsu, JP;
Takeshi Sakamoto, Hamamatsu, JP;
Kenichi Muramatsu, Hamamatsu, JP;
Takeshi Sakamoto, Hamamatsu, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A laser processing method which can prevent an object to be processed from being cut along a line to cut from a modified region acting as a cutting start point when separating a suction table and a holding member from each other is provided. An expandable tapeholding an object to be processedwhile being stuck to a frameis secured by suction onto a suction tableof a vacuum chuck with a porous sheetinterposed therebetween. Since the sheethas a Young's modulus lower than that of the table, the tapeis restrained from biting into fine pores of the sheet. As a consequence, even when the tableand tapeare separated from each other by releasing the suction securing after forming a modified region, no strong bending stress acts on the object. This can prevent the objectfrom being cut along a line to cut from the modified regionacting as a cutting start point when separating the tableand tapefrom each other.