The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Aug. 28, 2009
Katherina E. Babich, Chappaqua, NY (US);
Alessandro C. Callegari, Yorktown Heights, NY (US);
John J. Connolly, Ossining, NY (US);
Eugene J. O'sullivan, Nyack, NY (US);
Katherina E. Babich, Chappaqua, NY (US);
Alessandro C. Callegari, Yorktown Heights, NY (US);
John J. Connolly, Ossining, NY (US);
Eugene J. O'Sullivan, Nyack, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of selectively growing one or more carbon nano-tubes includes forming an insulating layer on a substrate, the insulating layer having a top surface; forming a via in the insulating layer; forming an active metal layer over the insulating layer, including sidewall and bottom surfaces of the via; and removing the active metal layer at portions of the top surface with an ion beam to enable the selective growth of one or more carbon nano-tubes inside the via.