The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Mar. 15, 2013
Applicant:
Genmark Automation, Inc., Milpitas, CA (US);
Inventors:
Alexander Todorov, Santa Clara, CA (US);
Zlatko Manolov Sotirov, Santa Clara, CA (US);
Assignee:
Genmark Automation, Inc., Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67718 (2013.01); H01L 21/68707 (2013.01); Y10S 294/902 (2013.01);
Abstract
In one embodiment, a flipping module operable to flip a workpiece delivered by a robot in a vacuum transfer chamber (VTC) includes a gripper disposed outside a working envelope of the robot in a parked position in a vacuum environment of the VTC, and an actuator operable to move the gripper from the parked position to a receiving position, and to rotate the gripper and workpiece to thereby flip the workpiece.