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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9099423 B1

PDFFull Text
Date of Patent:
Aug. 04, 2015

Filed:

Dec. 30, 2013

Doped semiconductor films and processing

Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventors:

Keith Doran Weeks, Gilbert, AZ (US);

John Tolle, Gilbert, AZ (US);

Matthew G. Goodman, Chandler, AZ (US);

Sandeep Mehta, Scottsdale, AZ (US);

Assignee:

ASM IP HOLDING B.V., , NL;

Attorney:

Knobbe, Martens, Olson & Bear LLP

Primary Examiner:

Roy Potter

Assistant Examiner:

Paul Patton

Int. Cl.
CPC ...
H01L 29/36 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 29/36 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/30604 (2013.01);
Abstract

A method of forming a semiconductor material incorporating an electrical dopant is disclosed. In one aspect, a method of incorporating dopant in a semiconductor film comprises forming a first semiconductor material incorporating the dopant at a first dopant concentration and preferentially etching a portion of the first semiconductor material, wherein etching leaves a first etched semiconductor material incorporating the dopant at a second dopant concentration higher than the first dopant concentration.

Find Patent Forward Citations

Weeks, Keith. (2015). Doped semiconductor films and processing (U.S. Patent No. 9099423). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9099423

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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