The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2015

Filed:

Oct. 05, 2012
Applicant:

Lightlab Sweden Ab, Stockholm, SE;

Inventors:

Qiu-Hong Hu, Göteborg, SE;

Shang-Ray Yang, Taipei, TW;

Kjell Bohlin, Uppsala, SE;

Assignee:

Lightlab Sweden AB, Stockholm, SE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01J 1/304 (2006.01); H01J 9/02 (2006.01); H01J 63/04 (2006.01); C30B 7/10 (2006.01); H01J 1/36 (2006.01); H01J 63/02 (2006.01); C30B 29/16 (2006.01);
U.S. Cl.
CPC ...
H01J 1/304 (2013.01); C30B 7/10 (2013.01); H01J 1/3044 (2013.01); H01J 1/36 (2013.01); H01J 9/025 (2013.01); H01J 63/02 (2013.01); H01J 63/04 (2013.01); C30B 29/16 (2013.01); H01J 2201/30496 (2013.01);
Abstract

The present invention relates to a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of protruding base structures () arranged on a surface of a first substrate (), providing a seed layer mixture, comprising a solvent/dispersant and a seed material, in contact with the protruding base structures, providing a second substrate arranged in parallel with the first substrate adjacent to the protruding base structures, thereby enclosing a majority of the seed layer mixture between the first and second substrates, evaporating the solvent, thereby forming a seed layer () comprising the seed material on the protruding base structures, removing the second substrate, providing a growth mixture, comprising a growth agent, in contact with the seed layer, and controlling the temperature of the growth mixture so that nanostructures () are formed on the seed layer via chemical reaction in presence of the growth agent.


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