The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2015

Filed:

Jan. 29, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Yann A. N. Astier, White Plains, NY (US);

Jingwei Bai, San Diego, CA (US);

Satyavolu S. Papa Rao, Poughkeepsie, NY (US);

Kathleen B. Reuter, Montrose, NY (US);

Joshua T. Smith, Croton on Hudson, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/487 (2006.01); H01L 29/06 (2006.01); H01L 29/41 (2006.01);
U.S. Cl.
CPC ...
G01N 33/48721 (2013.01); H01L 29/0669 (2013.01); H01L 29/413 (2013.01);
Abstract

An anti-retraction capping material is formed on a surface of a nanowire that is located upon a dielectric membrane. A gap is then formed into the anti-retraction capping material and nanowire forming first and second capped nanowire structures of a nanodevice. The nanodevice can be used for recognition tunneling measurements including, for example DNA sequencing. The anti-retraction capping material serves as a mobility barrier to pin, i.e., confine, a nanowire portion of each of the first and second capped nanowire structures in place, allowing long-term structural stability. In some embodiments, interelectrode leakage through solution during recognition tunneling measurements can be minimized.


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