The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Oct. 31, 2012
Applicant:
Wd Media, Inc., San Jose, CA (US);
Inventors:
Allen J. Bourez, San Jose, CA (US);
Noe D. Taburaza, Union City, CA (US);
Phi Cam Ha, Sacramento, CA (US);
Assignee:
WD Media, LLC, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/566 (2013.01);
Abstract
A station for a disk processing system includes a load lock chamber, a variable conductance valve configured to connect the chamber to a vacuum pump, and valve controller. The valve controller may include a processor that controls an electromechanical actuator to adjust the conductance of the valve during the evacuation of the chamber.