The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Oct. 18, 2010
Applicants:
Bernhard Stuetzel, Marl, DE;
Matthias Patz, Bottrop, DE;
Inventors:
Bernhard Stuetzel, Marl, DE;
Matthias Patz, Bottrop, DE;
Assignee:
Evonik Degussa GmbH, Essen, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 31/20 (2006.01); H01L 31/036 (2006.01); H01L 31/0376 (2006.01); H01L 29/12 (2006.01); H01L 31/0312 (2006.01); H01L 29/76 (2006.01); H01L 29/94 (2006.01); H01L 31/062 (2012.01); H01L 31/113 (2006.01); H01L 31/119 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C23C 18/1204 (2013.01); C23C 18/122 (2013.01); C23C 18/14 (2013.01); H01L 21/0242 (2013.01); H01L 21/02532 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/02628 (2013.01);
Abstract
The invention relates to a formulation which contains at least one silane and at least one carbon polymer in a solvent, and to the production of a silicon layer on a substrate which is coated with such a formulation.