The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 04, 2015

Filed:

Apr. 21, 2010
Applicants:

Koichiro Inaba, Yamaguchi, JP;

Kouji Toyota, Yamaguchi, JP;

Kenichi Haga, Yamaguchi, JP;

Kouichi Tokudome, Yamaguchi, JP;

Inventors:

Koichiro Inaba, Yamaguchi, JP;

Kouji Toyota, Yamaguchi, JP;

Kenichi Haga, Yamaguchi, JP;

Kouichi Tokudome, Yamaguchi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01G 9/02 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
C01G 9/02 (2013.01); H01L 31/1884 (2013.01); C01P 2002/50 (2013.01); C01P 2002/52 (2013.01); C01P 2002/72 (2013.01); C01P 2002/86 (2013.01); C01P 2006/40 (2013.01); C01P 2006/42 (2013.01); C01P 2006/60 (2013.01); Y02E 10/50 (2013.01);
Abstract

Disclosed is a composition for forming a zinc oxide thin film, which contains an organic zinc compound as a starting material, is not ignitable, and can be easily handled. The composition for forming a zinc oxide thin film is capable of forming a transparent zinc oxide thin film which is not doped or doped with a group 3B element by being heated at 300° C. or less. Also disclosed is a method for obtaining a transparent zinc oxide thin film, which is not doped or doped with a group 3B element, using the composition. Specifically, the composition for forming a zinc oxide thin film contains a product which is obtained by partially hydrolyzing an organic zinc compound by adding water to the organic zinc compound or a solution of the organic zinc compound and a group 3B element compound. In cases when a group 3B element compound is contained, the molar ratio of the group 3B element compound to the organic zinc compound is within the range of 0.005-0.3. The composition is applied to a substrate surface and then heated, thereby forming a zinc oxide thin film which is doped with the group 3B element.


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